Process Features
- Twin Well CMOS
- LOCOS Isolation
- Gate Oxide 60 A
- Gate: 0.25 µm (width) 0.60 µm (pitch)
- Contact Diameter: 0.36 µm
- 3 to 5 Al capability
- 1-4 Al: 0.44 µm (width) 0.84 µm (pitch)
- 5 Al: 3.0 µm (width) 6.0 µm (pitch)
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Device Features
- Supply Voltage: 2.5
0.2 V (normal transistor)
- Supply Voltage: 3.3
0.3 V (milti-oxide transistor)
- Min. Transistor Width: 0.56 um
- Min. Transistor Pitch: 1.00 um (Min. Gate Pitch w/ Contact)
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